- EPMA-JEOL iSP100
- FEG-SEM JEOL JSM-IT800 with EBDS system
Electron probe microanalyzer (EPMA)
JEOL SuperProbe JXA-iSP100
equipped with
– Tungsten-filament or LaB6
– 5 Wavelength dispersive crystal spectrometers:
One 4-crystal spectrometer:
TAP + LiF + LDE1 + LDEB
Four double crystal L-Type spectrometers:
LiFL + PETL
LiFL + PETL
TAPL + PETL
TAPL + PETL
– Energy Dispersive Spectroscopy (EDS) system, 30 mm² detector (with live view)
– Cathodoluminescence detector
Schottky emitter – Scanning electron microscope (FEG-SEM) with EBSD system
JEOL FEG-SEM JSM-IT800
equipped with
– In-lens Schottky emitter (FEG)
– Electron Backscatter Diffraction (EBSD) detector (Oxford Instruments, Symmetry 2)
– Energy Dispersive Spectroscopy (EDS) system (Oxford Instruments, Ultim Max 100 mm²)
– High vacuum SE and 6-sector BSE detectors
– Low-vacuum system (with SE and BSE detectors)
– Eucentric 5-axes stage (x / y / z / tilt / rotate)
– Sample size up to 100*100*50 mm